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MEMS deformable mirror
Boston Micromachines has pioneered MEMS (Micro Electro Mechanical Systems) deformable mirror technology, which uses MEMS deformable mirrors for advanc
Product details
MEMS (Micro Electro Mechanical Systems) deformable mirror technologyMEMS deformable mirror
Wilkes Optoelectronics provides users withBoston Micromachines Corporation(BMC)The types of microelectromechanical deformable mirrors and microelectromechanical segmented deformable mirrors are mainly divided into low actuator numbersDMMiddle actuator countDMAnd high number of actuatorsMEMSDeformable reflector.
Multi DM deformable mirrors can achieve up to 5.5 μmThe itinerary2 kHzThe frame rate, sub nanometer step size, and no lag. useX-DriverThe form isMulti-DMThe system provides high-speed electronic upgrades.
Number of middle actuatorsDMThe system is a high-performance wavefront corrector suitable for demanding applications such as astronomy, laser communication, and remote imaging, offering three types:Kilo-DM、492-DMand648-DM.
Kilo DM deformable mirror is an enabling component used for precise, high-speed, and high-resolution wavefront control. up to 1020 An actuator is controlled in1With precision below nanometers and no hysteresis, this system is highly suitable for demanding applications.
As a popularKilo-DMAlternative to deformable mirrors,492-DMand648-DMIt can be used at a lower cost and produce excellent results.492-DMand648-DMThe system will separately492and648The precision control of the actuator is within1 nmThe following is an ideal choice for astronomy and next-generation imaging applications without any lag.
Boston Micromachines'MEMS deformable mirrorAmong them, the number of low brakesMEMSReflectors are an economical and versatile aberration modulation solution for advanced wavefront control, with up to140Coupling between a precisely controlled component and a low actuator,Multi-DMThe system is an ideal choice for a wide range of applications including microscopy, astronomy, retinal imaging, and laser beam shaping. suchDMContinuous and segmented surfaces suitable for adaptive optics or spatial light modulator applications.
Boston Micromachines Corporation (BMC) has a high number of actuatorsMEMSThe industry leader in deformable mirror technology, these mirrors are deployed in renowned astronomical facilities around the world to enhance wavefront correction capabilities4K-DMInstalled on the Gemini Planet Imaging Instrument2K-DMIt is included in the design of multiple space telescope concepts.
In addition,2K-DMInstalled as Subaru coronagraph extreme adaptive optics（SCExAO）Instruments and Magellan Telescope(MagAO-X)The enabling component in the experimental coronal extreme adaptive optics system. For many years, both have been continuously operating in aerial observation.
MEMS deformable mirror features:
-Large array generates high-resolution wavefront correction.
-Advanced microstructures allow for minimal impact between adjacent actuators on high spatial frequency surfaces
-Optimization design enables fast wavefront shaping for high-speed applications
Micro electromechanical segmented deformable mirror,MEMSSpecification of deformable mirror:
|
DMmodel |
Number of actuators |
Number of cross aperture actuators |
Physical itinerary (μ)m） |
Wavefront travel (μ m)m） |
Aperture（mm） |
Pitch (μ)m） |
Mechanical response |
Update rate: Standard（kHz） |
Update rate: High speed（kHz） |
Approximate actuator coupling |
|
492-S-1.0-SLM |
492 |
24 |
1.0 |
2.0 |
9.60 |
400 |
＜80 |
60 |
n/a |
0 |
|
492-3.5-SLM |
492 |
24 |
3.5 |
7.0 |
9.60 |
400 |
＜80 |
45 |
n/a |
0 |
|
Kilo-CS-1.0-SLM |
952 |
34 |
1.0 |
2.0 |
13.60 |
400 |
＜80 |
60 |
n/a |
0 |
|
Kilo-C-3.5-SLM |
952 |
34 |
3.5 |
7.0 |
13.60 |
400 |
＜80 |
45 |
n/a |
0 |
|
2K-1.5L-SLM |
2040 |
50 |
1.5 |
3.0 |
20.00 |
400 |
＜20 |
30 |
n/a |
0 |
|
2K-3.5-SLM |
2040 |
50 |
3.5 |
7.0 |
20.00 |
400 |
＜80 |
30 |
n/a |
0 |
Please note: Fill factor>98%(SLM)Surface shape:<30 nm
*Custom actuators can be provided upon request
Micro electromechanical deformable mirror, MEMS deformable mirror specifications:
|
DMmodel |
Number of actuators |
Number of cross aperture actuators |
Physical stroke (μ m) |
Wavefront travel (μ m) |
Aperture (mm) |
Pitch (μ m) |
Mechanical response |
Update rate: standard (kHz) |
Update rate: High speed (kHz) |
Approximate actuator coupling |
|
Multi-C-1.5L-DM |
137 |
13 |
1.5 |
3.0 |
4.80 |
400 |
＜75 |
2 |
100 |
15% |
|
Multi-3.5-DM |
140 |
12 |
3.5 |
7.0 |
4.40 |
400 |
＜75 |
2 |
100 |
13% |
|
Multi-3.5L-DM |
140 |
12 |
3.5 |
7.0 |
4.95 |
450 |
＜75 |
2 |
100 |
13% |
|
Multi-5.5-DM |
140 |
12 |
5.5 |
11.0 |
4.95 |
450 |
＜100 |
2 |
100 |
22% |
|
492-S-0.6-DM |
492 |
24 |
0.6 |
1.2 |
6.90 |
300 |
＜20 |
60 |
n/a |
15% |
|
492-S-1.0-DM |
492 |
24 |
1.0 |
2.0 |
9.20 |
400 |
＜75 |
60 |
n/a |
13% |
|
492-1.5-DM |
492 |
24 |
1.5 |
3.0 |
6.90 |
300 |
＜20 |
45 |
60 |
15% |
|
492-3.5-DM |
492 |
24 |
3.5 |
7.0 |
9.20 |
400 |
＜75 |
45 |
60 |
13% |
|
492-5.5-DM |
492 |
24 |
5.5 |
11.0 |
10.35 |
450 |
＜100 |
45 |
60 |
22% |
|
648-5.5-DM |
648 |
28 |
5.5 |
11.0 |
12.15 |
450 |
＜100 |
45 |
60 |
22% |
|
Kilo-CS-0.6-DM |
952 |
34 |
0.6 |
1.2 |
9.90 |
300 |
＜20 |
60 |
n/a |
15% |
|
Kilo-CS-1.0-DM |
952 |
34 |
1.0 |
2.0 |
13.20 |
400 |
＜75 |
60 |
n/a |
13% |
|
Kilo-C-1.5-DM |
952 |
34 |
1.5 |
3.0 |
9.90 |
300 |
＜20 |
45 |
60 |
15% |
|
Kilo-C-3.5-DM |
952 |
34 |
3.5 |
7.0 |
13.20 |
400 |
＜75 |
45 |
60 |
13% |
|
2K-1.5L-DM |
2040 |
50 |
1.5 |
3.0 |
19.60 |
400 |
＜40 |
30 |
n/a |
15% |
|
2K-3.5-DM |
2040 |
50 |
3.5 |
7.0 |
19.60 |
400 |
＜75 |
30 |
n/a |
13% |
|
3K-1.5-DM |
3063 |
62 |
1.5 |
3.0 |
18.30 |
300 |
＜20 |
16 |
n/a |
15% |
|
4K-3.5-DM |
4092 |
64 |
3.5 |
7.0 |
25.20 |
400 |
＜75 |
16 |
n/a |
13% |
Please note: Fill factor>99% (DM), surface shape:< 30 nm
*Custom actuators can be provided upon request
Options available for MEMS deformable mirrors:
|
deformable mirror |
cladding material |
windowARCoating layer（nm） |
drive* |
|
Multi |
Aluminum gold protective silver |
400-1100 550-2500 650-1050 1050-1700 1550 |
Multi-Driver X-Driver |
|
492 648 ** Kilo |
400-1100 550-2500 1550 |
S-Driver ** Kilo-Driver Kilo-Low-Latency-Driver |
|
|
2K 3K 4K |
400-1100 550-2500 1550 |
+K Driver |
*Sub nanometer average step size
**S-Driver is not suitable for648 DM
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